Standard test methods for leakage measurement using the mass spectrometer leak detector or residual gas analyzer in the hood mode 用罩式質(zhì)譜探漏儀或殘余氣體分析儀作檢漏測量的標準試驗方法
Standard test methods for leaks using the mass spectrometer leak detector or residual gas analyzer in the tracer probe mode 在示蹤探針法中用質(zhì)譜儀檢漏器或殘余氣體分析器作泄漏檢驗的測試方法
A residual gas analyser (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in vacuum systems. Utilizing quadrupole technology, there exists two implementations, utilizing either an open ion source (OIS) or a closed ion source (CIS).